Integratable all- solid- state thin- film microbatteries

• 成果类型: Article
• 署名作者: Ke, Bingyuan; Wang, Xinghui
• 署名单位: Fuzhou University; Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China
• 刊物名称: PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
• ISSN/ISSBN: 0027-8424; 1091-6490
• DOI: 10.1073/pnas.2415693122
• 发表日期: 2025-04-22
• 页码: e2415693122
• 关键词: Si anodes; solid-state batteries; integration; chemo-mechanics; IN-SITU MEASUREMENTS; stress evolution; lithiation; batteries; delamination; electrodes; fracture; energy; anode

摘要

Large- scale integration of microbattery systems on chips has long been hindered by the technical barrier between electrochemistry and microelectronics, particularly in terms of the compatibility of microbattery cells and their collective manufacturability. In this work, a silicon- based all- solid- state thin- film microbattery cell is developed at low temperatures for on- chip integration applications. Stress management at the interfaces covering both the resistance to interfacial fracture and the stress dissipation through strain regulation enables microbattery cells to deliver a high- rate performance (34.4 mA cm-2), fast charge-discharge properties (1,000,000 cycles at 20 mA cm-2), and high- temperature tolerance (150 degrees C) under zero stack pressure. An intrinsic relationship among lithium utilization ratio, strain, stress, and interface manifestation is uncovered. A collective microfabrication protocol for on- chip microbattery packs is proposed, resulting in a prototype of series- connected microbattery packs. This work focuses on practically addressing the technologies and challenges in engineering on- chip microbattery systems for large- scale integration.