CMOS- compatible reconstructive spectrometers with self- referencing integrated Fabry-Perot resonators

• 成果类型: Article
• 署名作者: You, Chunyu; Li, Xing; Hu, Yuhang; Huang, Ningge; Wang, Yang; Wu, Binmin; Jiang, Guobang; Huang, Jiayuan; Zhang, Ziyu; Chen, Bingxin; Wu, Yue; Liu, Junhan; Chen, Xiangzhong; Song, Enming; Cui, Jizhai; Zhou, Peng; Di, Zengfeng; An, Zhenghua; Huang, Gaoshan; Mei, Yongfeng
• 署名单位: Fudan University; Fudan University; Fudan University; Fudan University; Fudan University; Fudan University; Fudan University; Fudan University; Chinese Academy of Sciences; Shanghai Institute of Microsystem & Information Technology, CAS
• 刊物名称: PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA
• ISSN/ISSBN: 0027-13919
• DOI: 10.1073/pnas.2403950121
• 发表日期: 2024-08-13
• 关键词: spectroscopy

摘要

Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of similar to 2.5 nm, an average wavelength deviation of similar to 0.27 nm, and a resolution-to-bandwidth ratio of similar to 0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.