Microchip minutiae imaged using rapid X-ray bursts
成果类型：
Editorial Material
署名作者：
Gorkhover, Tais; Rupp, Daniela
署名单位：
University of Hamburg; Swiss Federal Institutes of Technology Domain; ETH Zurich
刊物名称：
Nature
ISSN/ISSBN：
0028-5243
DOI：
10.1038/d41586-024-02377-7
发表日期：
2024-08-01
页码：
36-38
关键词：
摘要：
As components on a computer chip shrink, their structure becomes ever-more complicated to image. A method that uses bursts of X-rays offers high-resolution, rapid-fire visualization down to single-transistor level.