Super-tetragonal Sr4Al2O7 as a sacrificial layer for high-integrity freestanding oxide membranes

• 成果类型: Article
• 署名作者: Zhang, Jinfeng; Lin, Ting; Wang, Ao; Wang, Xiaochao; He, Qingyu; Ye, Huan; Lu, Jingdi; Wang, Qing; Liang, Zhengguo; Jin, Feng; Chen, Shengru; Fan, Minghui; Guo, Er-Jia; Zhang, Qinghua; Gu, Lin; Luo, Zhenlin; Si, Liang; Wu, Wenbin; Wang, Lingfei
• 署名单位: Chinese Academy of Sciences; University of Science & Technology of China, CAS; Chinese Academy of Sciences; Institute of Physics, CAS; Northwest University Xi'an; Chinese Academy of Sciences; University of Science & Technology of China, CAS; Tsinghua University; Tsinghua University; Technische Universitat Wien; Anhui University; Collaborative Innovation Center of Advanced Microstructures (CICAM); Nanjing University
• 刊物名称: SCIENCE
• ISSN/ISSBN: 0036-10224
• DOI: 10.1126/science.adi6620
• 发表日期: 2024-01-26
• 页码: 388-394
• 关键词: total-energy calculations; pulsed-laser deposition; crystal-structure; heterostructures; integration; films

摘要

Identifying a suitable water-soluble sacrificial layer is crucial to fabricating large-scale freestanding oxide membranes, which offer attractive functionalities and integrations with advanced semiconductor technologies. Here, we introduce a water-soluble sacrificial layer, super-tetragonal Sr4Al2O7 (SAO(T)). The low-symmetric crystal structure enables a superior capability to sustain epitaxial strain, allowing for broad tunability in lattice constants. The resultant structural coherency and defect-free interface in perovskite ABO(3)/SAO(T) heterostructures effectively restrain crack formation during the water release of freestanding oxide membranes. For a variety of nonferroelectric oxide membranes, the crack-free areas can span up to a millimeter in scale. This compelling feature, combined with the inherent high water solubility, makes SAO(T) a versatile and feasible sacrificial layer for producing high-quality freestanding oxide membranes, thereby boosting their potential for innovative device applications.