Scalable production of ultraflat and ultraflexible diamond membrane

• 成果类型: Article
• 署名作者: Jing, Jixiang; Sun, Fuqiang; Wang, Zhongqiang; Ma, Linjie; Luo, Yumeng; Du, Zhiyuan; Zhang, Tianyu; Wang, Yicheng; Xu, Feng; Zhang, Tongtong; Chen, Changsheng; Ma, Xuhang; He, Yang; Zhu, Ye; Sun, Huarui; Wang, Xinqiang; Zhou, Yan; Tsoi, James Kit Hon; Wrachtrup, Joerg; Wong, Ngai; Li, Can; Ki, Dong-Keun; Wang, Qi; Li, Kwai Hei; Lin, Yuan; Chu, Zhiqin
• 署名单位: University of Hong Kong; Peking University; University of Hong Kong; Southern University of Science & Technology; University of Hong Kong; University of Hong Kong; Hong Kong Polytechnic University; Southern University of Science & Technology; Harbin Institute of Technology; Harbin Institute of Technology; Peking University; Peking University; The Chinese University of Hong Kong, Shenzhen; University of Hong Kong; University of Stuttgart; Max Planck Society; University of Hong Kong
• 刊物名称: Nature
• ISSN/ISSBN: 0028-3987
• DOI: 10.1038/s41586-024-08218-x
• 发表日期: 2024-12-19
• 关键词: deformation; fabrication

摘要

Diamond is an exceptional material with great potential across various fields owing to its interesting properties1,2. However, despite extensive efforts over the past decades3, 4-5, producing large quantities of desired ultrathin diamond membranes for widespread use remains challenging. Here we demonstrate that edge-exposed exfoliation using sticky tape is a simple, scalable and reliable method for producing ultrathin and transferable polycrystalline diamond membranes. Our approach enables the mass production of large-area (2-inch wafer), ultrathin (sub-micrometre thickness), ultraflat (sub-nano surface roughness) and ultraflexible (360 degrees bendable) diamond membranes. These high-quality membranes, which have a flat workable surface, support standard micromanufacturing techniques, and their ultraflexible nature allows for direct elastic strain engineering and deformation sensing applications, which is not possible with their bulky counterpart. Systematic experimental and theoretical studies reveal that the quality of the exfoliated membranes depends on the peeling angle and membrane thickness, for which largely intact diamond membranes can be robustly produced within an optimal operation window. This single-step method, which opens up new avenues for the mass production of high-figure-of-merit diamond membranes, is expected to accelerate the commercialization and arrival of the diamond era in electronics, photonics and other related fields.